Record software revenue grew 28% over the prior quarter driven by specialty device manufacturers. Received commitments for six additional manufacturing slots for advanced packaging lithography tool deliveries in 20. Inspection revenue increased 21% over the prior quarter.
New top five IDM selected Onto Innovation’s integrated metrology platform, contributing to 50% integrated metrology revenue growth year-to-date over the same period in 2020. Metrology revenue from advanced logic customers increased 95% over the second quarter, driven by investments in next-generation transistor structures and expanding applications. Year-to-date cash flow from operations totaled $126.3 million, or 22% of revenue. Operating margin improved to 21% GAAP and 29% non-GAAP, in line with the Company’s $800 million long-term operating model. Gross margin improved to 55% from 54% year-over-year. Quarterly revenue of $200.6 million represents 59% year-over-year growth compared to the third quarter of 2020.
